Distributions of Electron Density and Electron Temperature in Magnetized DC Discharge
نویسندگان
چکیده
منابع مشابه
Electron energy distributions in a magnetized inductively coupled plasma
Sang-Heon Song, Yang Yang, Pascal Chabert, and Mark J. Kushner Department of Nuclear Engineering and Radiological Sciences, University of Michigan, 2355 Bonisteel Boulevard, Ann Arbor, Michigan 48109-2104, USA Applied Materials Inc., 974 E. Arques Avenue, M/S 81312, Sunnyvale, California 94085, USA LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France Department of Electrical ...
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ژورنال
عنوان ژورنال: Physical Science International Journal
سال: 2014
ISSN: 2348-0130
DOI: 10.9734/psij/2014/9604